SOFT MAGNETISM FILM, ITS MANUFACTURING METHOD, AND MANUFACTURING METHOD OF THIN FILM MAGNETIC HEAD

摘要

PROBLEM TO BE SOLVED: To manufacture stably a soft magnetism film with good softness magnetism characteristics and large saturation magnetic flux density. SOLUTION: The soft magnetism film made of an alloy comprising iron and nickel as main elements is manufactured by electroplating by using the plating current whose direction changes alternately. In this soft magnetism film, when the iron rate is expressed as a% by weight and the nickel rate is expressed as (100-a)% by weight to the sum total of the iron and nickel which are contained in the alloy, the percentage (a) is 80 or more and less than 100. Further, the saturation magnetic flux density of the soft magnetism film is 2.0T or more. When the sum total of the iron and nickel which are contained in the alloy is considered as 100% by weight, the rate of elements other than the iron and nickel contained in the alloy is 1.3% or less by weight. COPYRIGHT: (C)2006,JPO&NCIPI