IN-PRINT METHOD AND IN-PRINT DEVICE

摘要

An imprinting method of the present invention is to press a mold member (40) having thereon a mold pattern onto a film carried on a principal plane of a substrate (50) as an object to be processed, so as to transfer the mold pattern to the film. A plurality of substrates (50) are fixed on a chuck stage (20). One of the substrates (50) can be selectively heated by a heater (21) and a cooling line (22). The mold member (40) is fixed on a head plate (30) which is disposed to be opposed to the chuck stage (20). The selectively heated substrate (50) and the mold member (40) are positioned relative to each other, and the mold member (40) is pressed onto a film on the substrate (50). By repeating this operation, all the substrates (50) are imprinted.