首页
产品
黄页
商标
征信
会员服务
注册
登录
全部
|
企业名
|
法人/股东/高管
|
品牌/产品
|
地址
|
经营范围
发明名称
SUBSTRATE SUPPORT HAVING DYNAMIC TEMPERATURE CONTROL
摘要
申请公布号
EP1644962(A2)
申请公布日期
2006.04.12
申请号
EP20040777208
申请日期
2004.06.28
申请人
LAM RESEARCH CORPORATION
发明人
STEGER, ROBERT, J.
分类号
H01L21/00;C23C16/00;C23C16/458;C23C16/46;C23C16/505;F27D5/00;H01L;H01L21/306;H01L21/683;H02N13/00;(IPC1-7):H01L21/00
主分类号
H01L21/00
代理机构
代理人
主权项
地址
您可能感兴趣的专利
NATTO
PORTABLE TERMINAL, APPARATUS, SERVER, CHARACTER ENCODING METHOD, AND PROGRAM
RNAi MODULATION OF MLL-AF4 AND USE THEREOF
VEHICULAR LAMP
IMAGE DISPLAY DEVICE, ELECTRONIC EQUIPMENT, IMAGE DISPLAY SYSTEM, IMAGE ACQUISITION METHOD, AND PROGRAM
LIGHT-EMITTING DIODE
NETWORK SYSTEM
LIGHT-EMITTING DIODE ELEMENT AND METHOD OF MANUFACTURING THE SAME
MESSAGE DELIVERY APPARATUS, MESSAGE DELIVERY SYSTEM, AND MESSAGE DELIVERY METHOD
LIGHT-EMITTING DIODE
MOVING IMAGE ENCODER, MOVING IMAGE ENCODING METHOD AND MOVING IMAGE ENCODING PROGRAM
WATER HEATER
STEERING CONTROL APPARATUS
THERMOSETTING EPOXY RESIN COMPOSITION, PRE-MOLD PACKAGE, LED DEVICE AND SEMICONDUCTOR DEVICE
CONTROL DEVICE OF ROTARY MACHINE
IMAGING APPARATUS, DISPLAY DEVICE, PROGRAM, AND RECORDING MEDIA
LOAD DRIVE CIRCUIT DEVICE AND ELECTRICAL EQUIPMENT USING THE SAME
TIRE/WHEEL SYSTEM
NUCLEOTIDE AND USE THEREOF FOR MODULATING EXPRESSION OF PROTEIN-KINASE C BETA-1 ISOFORM IN FORM OF SKIN DEPIGMENTATION AGENT
PARALLEL HYBRID VEHICLE
