| 摘要 |
PROBLEM TO BE SOLVED: To obtain a thin film having excellent quality in the case of forming the thin film by generating discharge plasma by using raw gas containing carbon source. SOLUTION: A base material 6 is installed on at least one of opposing electrodes 4, 5. Discharge plasma is generated by applying the pulse voltage between the opposing electrodes 4, 5 under the atmosphere containing raw material gas A containing carbon source, and a thin film 7 is generated on the base material 6. Positive pulse and negative pulse are applied as the pulse voltage, and the pulse half band width of the positive pulse and negative pulse is≤1,000 nsec. COPYRIGHT: (C)2006,JPO&NCIPI |
