RADIATION GENERATING DEVICE, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND DEVICE MANUFACTURED THEREBY

摘要

PROBLEM TO BE SOLVED: To provide a device or a source for generating discharge producing plasma (DPP) radiation for combining advantages of the device or the source for generating DPP radiation and many of advantages of a laser producing plasma (LPP) source.

SOLUTION: The device for generating a radiation source based on a discharge includes a cathode and an anode. Material of the cathode and the anode is supplied in a fluid state. The material forms a plasma pinch when the device is in use. Optionally, nozzles may be used to supply the material. The cathode and/or the anode may form a flat surface. The trajectories of the material may be elongated. A laser may be used to cause the discharge more easily. The laser may be directed on the anode or the cathode or on a separate material located in between the anode and the cathode.

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