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经营范围
发明名称
Arc chamber of ion beam implanter
摘要
申请公布号
KR100518529(B1)
申请公布日期
2005.10.04
申请号
KR19990022538
申请日期
1999.06.16
申请人
发明人
分类号
H01L21/265;(IPC1-7):H01L21/265
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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