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发明名称
Verfahren und Vorrichtung zur Erzeugung von gasförmigen Ionen unter Verwendung von Röntgenstrahlen
摘要
申请公布号
DE69333576(T2)
申请公布日期
2005.08.25
申请号
DE19936033576T
申请日期
1993.08.13
申请人
HAMAMATSU PHOTONICS K.K., HAMAMATSU;OHMI, TADAHIRO
发明人
OHMI, TADAHIRO;INABA, HITOSHI;IKEDO, TOMOYUKI
分类号
H05F3/06;(IPC1-7):H05F3/06;H01L21/00
主分类号
H05F3/06
代理机构
代理人
主权项
地址
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