| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro-resonator having a desired resonant frequency, a method of manufacturing the micro-resonator by which the micro-resonator can be manufactured with high yield, and an electronic apparatus equipped with the micro-resonator. SOLUTION: The micro-resonator 10 has a configuration in which a resonator 40 is disposed between a fixed electrode 22 having a comb tooth part 21 and a fixed electrode 32 having a comb tooth part 31. The resonator 40 has a movable electrode 24 disposed so that a comb-shaped tooth 23 is engaged with the comb tooth part 21 of the fixed electrode 22, and a movable electrode 34 disposed so that a comb tooth part 33 is engaged with the comb tooth part 31 of the fixed electrode 32, and a weight 45 is formed on a coupling beam 41 for coupling these movable electrodes 24, 34. The weight 45 is provided to adjust at least any one of the resonant frequency and the resonant mode of the resonator 40. COPYRIGHT: (C)2005,JPO&NCIPI
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