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发明名称
摘要
申请公布号
JP2005510088(A)
申请公布日期
2005.04.14
申请号
JP20030546407
申请日期
2002.11.20
申请人
发明人
分类号
H01L21/336;H01L29/10;H01L29/45;H01L29/78;(IPC1-7):H01L29/78
主分类号
H01L21/336
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