METHOD FOR MANUFACTURING TFT, AND METHOD FOR MANUFACTURING DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a TFT wherein productivity is high and cost is low. SOLUTION: The method for manufacturing a TFT is characterized in that: a base film material is spread on the surface of a glass substrate 1 with ink jet system, and a base film 2 is formed; a polysilicon film formation process wherein an amorphous silicon film is formed on the surface of the base film 2 by plating or ordinary pressure chemical vapor deposition, the amorphous silicon film is made polycrystalline, and a polysilicon film 3 is formed; a mask pattern forming process wherein a first mask pattern 6 formed of graft polymer is formed on a surface of the polysilicon film 3; and a polysilicon island formation process wherein the polysilicon film 3 is etched by using the first mask pattern 6 and a polysilicon island 7 is formed. COPYRIGHT: (C)2005,JPO&NCIPI