发明名称 |
METHOD OF INHIBITING CORROSION OF COPPER PLATED OR METALLIZED SURFACES AND CIRCUITRY DURING SEMICONDUCTOR MANUFACTURING PROCESSES |
摘要 |
A treatment bath for use in the manufacture of copper plated or metallized semiconductor devices and a method of inhibiting corrosion of copper plated or metallized surfaces and circuitry in the semiconductor devices immersed in an aqueous fluid in a treatment bath comprising adding to the aqueous fluid an effective corrosion inhibiting amount of one or more aromatic triazole corrosion inhibitors; fluorometrically monitoring the concentration of aromatic triazole corrosion inhibitors in the aqueous fluid; and adding additional aromatic triazole corrosion inhibitor to the aqueous fluid to maintain an effective corrosion inhibiting concentration of the aromatic triazole corrosion inhibitor in the aqueous fluid. |
申请公布号 |
WO2005015608(A2) |
申请公布日期 |
2005.02.17 |
申请号 |
WO2004US17977 |
申请日期 |
2004.06.07 |
申请人 |
NALCO COMPANY |
发明人 |
JENKINS, BRIAN, V.;HOOTS, JOHN, E. |
分类号 |
C23F11/14;H01L21/288 |
主分类号 |
C23F11/14 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|