CONSTANT-TEMPERATURE WATER CIRCULATION DEVICE FOR MAINTAINING TEMPERATURE OF PHOTORESISTOR DEVELOPING LIQUID

摘要

PURPOSE: A constant-temperature water circulation device for maintaining a temperature of a photoresistor developing liquid circulates a contract-temperature liquid, and makes a developing liquid maintain a constant temperature. CONSTITUTION: A constant-temperature water circulation device forms air tube(32) in one direction, allows air to be passed through with a constant pressure, and forms a vacuum tube(34) connected to the air tube(32). Because of air inflow pressure, a vacuum is made. A constant-temperature water circulation tube(28) passes through a vacuum tube(34) and air tube(32), a constant-temperature water is continuously flowed by a vacuum pressure and inflow pressure. A vacuum ejector(30) is mounted to a constant-temperature water circulation device. Thereby, a temperature of a developing liquid used to a developing process and a photoresistor deposition process of a semiconductor manufacturing process is always maintained.