METHOD AND SYSTEM FOR GENERATING A PLASMA

摘要

A method and system respectively for generating plasma (8) between electrodes (1, 2) separated by a gaseous or vaporous dielectric, to which a voltage source has been connected. In order to prevent flashover, the electrodes may be provided with a solid dielectric (3, 4). Pollution and/or ageing of the electrode protective layer can successfully be prevented by regularly "changing" this protective layer by means of a movable protective layer (5, 9) which is moved over or along the respective electrode, through the area in which the plasma is generated. When the plasma is used for treating a film-shaped base material (coating, etching, etc.) this film can at the same time be used as movable electrode shielding.