| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To accommodate from minute to large flows and ensure high precision flow control even under a minute flow rate. <P>SOLUTION: A flow rate control device includes a regulator 20 for reducing a supplied liquid pressure, a flow regulating valve 22 connected in series to a downstream end of the regulator 20 and designed to regulate the valve opening of a valve disposed in a passage, and a flow sensor 18 for detecting a liquid flow. According to the detection value of the flow sensor 18 and a flow command, a regulator control input is computed, and a valve opening control input to the flow regulating valve 22 is computed for control. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
