DEVICE AND METHOD FOR PLASMA TREATMENT

摘要

PROBLEM TO BE SOLVED: To provide a device and a method for a plasma treatment for efficiently making gases containing volatile and hazardous substances innoxious under an atmospheric pressure by controlling the formation of byproducts (N2O, NOX) in an electric discharge.

SOLUTION: The device for plasma treatment comprising a plasma reactor having a space for plasma treatment of gases by generating the electric discharge under the atmospheric pressure is characterized in that the above space for plasma treatment is equipped with a ground side electrode (3) and a high-tension side electrode (2); an inorganic dielectric (4) is loaded between the above ground side electrode and the above high-tension side electrode in the above space for plasma treatment; and another inorganic dielectric (5) having a different dielectric constant from that of the above inorganic dielectric (4) is loaded between the above inorganic dielectric (4) and at least one of the above ground side electrode and the above high-tension side electrode.

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