| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrode sheet to be easily manufactured and provided with a conductive member which hardly falls off from a sheet. SOLUTION: The electrode sheet 10 comprises a sheet-like insulative member 11 and conductive members 12 provided such that the members pass through the insulative member 11 in its thickness direction. The conductive members 12 of the electrode sheet 10 are formed so that regarding their cross-sections parallel to front and back surfaces of the insulative member 11, their cross-sectional areas inward in the thickness direction of the insulative member 11 are larger than those near the front and back surfaces of the insulative member 11. As a result, the conductive members 12 do not fall from the insulative member 11. Then, use of the electrode sheet 10 as an electric connection member in manufacturing semiconductor parts improves reliability in the electric connection. COPYRIGHT: (C)2004,JPO
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