MANUFACTURING METHOD FOR FILM BULK ACOUSTIC RESONATOR FILTER AND CIRCUIT USING FILM BULK ACOUSTIC RESONATOR FILTER

摘要

PROBLEM TO BE SOLVED: To provide a better method for forming a thin film bulk acoustic resonator filter. SOLUTION: The film bulk acoustic resonator filter 10 is formed of a plurality of interconnected series and shunt film bulk acoustic resonators 38 formed on the same membrane 35. Each of the film bulk acoustic resonator 38 is formed of one common lower conductive layer which is defined to form a bottom electrode 32 of the film bulk acoustic resonator 38. The one common conductive layer is defined to form a top electrode 36 of each of the film bulk acoustic resonator 38. One common piezoelectric film layer 34 which may or may not be not patterned forms one continuous or discontinuous film. COPYRIGHT: (C)2004,JPO