发明名称 |
Method for manufacturing piezo-electric vibrator |
摘要 |
A piezo-electric vibrator having an electrode structure enabling to avoid unevenness of junction is to be provided. Plural electrode patterns 160 consisting of a pair of exciting electrode films 80 and 81 formed on a crystal vibrator 110 and frame electrodes 38 and 39 formed on each frame-shaped portion 100 and connected to a pair of exciting electrode films 80 and 81 are formed, and course adjusting of frequency is carried out. After that, plural electrode patterns consisting of a pair of exciting electrodes 80 and 81 formed on each crystal vibrator piece 110 and joining films 40 and 41 formed on each frame-shaped portion 100 and connected to the pair of exciting electrode films 80 and 81 in which each of them is shorted is formed on a crystal wafer 130 forming plural vibrators 20 consisting of the crystal vibrator piece 110 and the frame-shaped portion 100 again so as to carry out anode junction by making applying voltage possible.
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申请公布号 |
US2003154584(A1) |
申请公布日期 |
2003.08.21 |
申请号 |
US20030358860 |
申请日期 |
2003.02.05 |
申请人 |
ARATAKE KIYOSHI;SHIRAISHI MASAYOSHI |
发明人 |
ARATAKE KIYOSHI;SHIRAISHI MASAYOSHI |
分类号 |
H01L41/09;H01L41/18;H01L41/22;H03H3/02;H03H3/04;H03H9/19;H04R17/00;(IPC1-7):H04R17/00;H05K3/10 |
主分类号 |
H01L41/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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