STAGE DEVICE AND EXPOSURE DEVICE

摘要

A stage device comprises a stage main body (1A) movably supported by a base (22) having a movement surface, and a first drive unit (61A) having a fixed element (65) and a movable element (64A) disposed in the stage main body (1A) for driving the state main body (1A). The fixed element (65) is disposed in a support section (7), which is independent from the base (22). A canceling device (45) cancels the independent state of the support section (7) from the base (22) in response to relative displacement between the base (22) and the support section (7) in a first direction substantially orthogonal to the movement surface.