| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical waveguide structure which enables improvement of the alignment precision. SOLUTION: With respect to an optical waveguide structure having a core, a clad, and an alignment mark for alignment, the alignment mark is constituted of the same material as the core, and the periphery of the alignment mark is constituted of a material having a light transmittance lower than those of the core material and the clad material, and a contrast area of which the thickness is equal to or smaller than that of the core is provided. COPYRIGHT: (C)2003,JPO |
