| 发明名称 |
CHEMICALLY-AMPLIFIED POSITIVE PHOTORESIST COMPOSITION |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a new chemically-amplified positive photoresist composition having so improved storage stability as to give a photospeed which is substantially constant with age. <P>SOLUTION: The chemically-amplified positive photoresist composition comprises a resin, a photoacid generator compound and an organic acid. <P>COPYRIGHT: (C)2003,JPO |
| 申请公布号 |
JP2003177516(A) |
申请公布日期 |
2003.06.27 |
| 申请号 |
JP20020236583 |
申请日期 |
2002.08.14 |
| 申请人 |
SHIPLEY CO LLC |
发明人 |
CAMERON JAMES W;ABLAZA SHERI L |
| 分类号 |
G03F7/004;G03F7/039;H01L21/027 |
主分类号 |
G03F7/004 |
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