发明名称 |
Surface-acoustic-wave pressure sensor and associated methods |
摘要 |
A pressure and temperature sensor includes a sealed insulating package and an elastic, piezoelectric substrate deformably supported within the package. At least three surface-acoustic-wave resonators are affixed to a bottom of the substrate. A first and a second resonator are positioned in parallel relation along the substrate. A third resonator has a long axis nonparallel to the long axes of the first and the second resonator. The temperature coefficients of the first and second resonators are substantially equivalent; that of the third is different from those of the first and the second resonator, for permitting a temperature change to be sensed. Electrical connectors extend between the resonators to the outside of the package. A sensing system also includes an antenna for sending and receiving electromagnetic signals to and from the device.
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申请公布号 |
US6571638(B2) |
申请公布日期 |
2003.06.03 |
申请号 |
US20010895873 |
申请日期 |
2001.06.29 |
申请人 |
SAWTEK, INC. |
发明人 |
HINES JACQUELINE;CARPENTER CHARLES;SOLIE LELAND P. |
分类号 |
B60C23/04;G01L9/00;G01L19/00;(IPC1-7):G01L11/00 |
主分类号 |
B60C23/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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