MANUFACTURING METHOD FOR THERMOPILE INFRARED SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method for a thermopile infrared sensor which can easily be manufactured at a low cost. SOLUTION: On a silicon substrate 1, many films 6 and 8 of different kinds of materials are extended alternately in series; and alternate joint parts 11 are covered with an infrared-ray absorption film 10 and a through-hole 2 is bored in the silicon substrate 1 below them. After the films 6 and 8 of different kinds of materials are formed on the main surface side of the silicon substrate 1, the through-hole 2 is bored, by etching the silicon substrate 1 from its reverse surface side and then the infrared absorbing film 10 is formed, by screen printing on the main surface side of the silicon substrate 1. The pressure that the silicon substrate 1 receives during the screen printing is set to >=0.25 MPa.