Apparat zur Bestrahlung mit Elektronenstrahlen und Verfahren zur Bestrahlung mit Elektronenstrahlen

摘要

An electron beam exposure apparatus characterized by comprising an electron gun producing an electron beam, a first shaping member for shaping the cross-sectional shape of the electron beam, a second shaping member serving as a splitting member having a splitting part including splitting openings for splitting the electron beam into electron beams of different shapes, and a blocking member for blocking at least one of the electron beams.