MICRO FLUID DEVICE HAVING MICRO VALVE MECHANISM, MICRO VALVE MECHANISM DRIVING APPARATUS THEREFOR, AND FLOW CONTROL METHOD

摘要

PROBLEM TO BE SOLVED: To provide a micro fluid device which can control a flow rate of a fluid by a simple method without requiring piping or wiring connection for valve mechanism drive. SOLUTION: A diaphragm is adhered to a member A having a defective part, and a cavity A as an inlet, outlet or flow path of fluid is formed by the defective part of the member A and the diaphragm. The diaphragm has an area of 1×10<-10> to 1×10<-5> m<2> and a thickness of 0.1 to 500 μm. The diaphragm has a strong magnetic material adhered and fixed thereto. Alternatively, a member B having a defective part is adhered to the opposite side of the member A of the diaphragm so that a cavity B is formed across the diaphragm from the cavity A by the defective part of the member B and the diaphragm. The cavity B has a strong magnetic material packed therein. The micro fluid device has a micro valve mechanism wherein the volume of the cavity A is changed by deforming the diaphragm with a magnetic line of force so as to control a flow rate of the fluid passing through the cavity A.