发明名称 Gas discharge laser with pulse multiplier
摘要 A gas discharge laser with a pulse multiplier. In the pulse multiplier, short pulses from the laser are divided into portions and all or all but one of these portions are delayed in delay legs by different time periods and recombined to provide a stretched output pulse having substantially reduced intensity and longer duration as compared to the pulse from the laser. Focusing optics are included in each delay leg to assure that beam size and angular spread of each portion of the combined pulse is not substantially different from other portions of the pulse.
申请公布号 US6535531(B1) 申请公布日期 2003.03.18
申请号 US20010006913 申请日期 2001.11.29
申请人 CYMER, INC. 发明人 SMITH SCOTT T.;ERSHOV ALEXANDER I.;RAO RAJASEKHAR M.
分类号 H01S3/00;H01S3/036;H01S3/038;H01S3/134;H01S3/225;H01S3/23;(IPC1-7):H01S3/10 主分类号 H01S3/00
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