| 摘要 |
A Wire Bonder contains a bondhead which comprises a slide, a rotary beam rotatable on a vertical axis and a rocker mounted on the rotary beam. The slide is movable back and forth in a predetermined horizontal direction and moves the rotary beam with it. The slide preferably bears on a horizontally arranged glide plate by means of an air bearing charged with vacuum. The rotary beam also preferably bears on the glide plate by means of a further air bearing charged with vacuum. A drive arranged on the slide is preferably foreseen for the rotating movement of the rotary beam. |
