发明名称 FILM-FORMING APPARATUS AND FILM-FORMING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a film-forming apparatus and a film-forming method where a film can be formed, while the film thickness is being controlled. SOLUTION: The film-forming apparatus is provided with a turntable 1 and a film-forming fixture 2 placed on a substrate 3 which is placed on the turntable 1, and a cover layer 4A is formed on the optical disk substrate 3, by rotating the turntable 1 in a state with UV-curing resin 4 being supplied, so as to come into contact with the periphery of the film-forming fixture 2.
申请公布号 JP2002184047(A) 申请公布日期 2002.06.28
申请号 JP20000377405 申请日期 2000.12.12
申请人 PIONEER ELECTRONIC CORP 发明人 SHIDA NOBUYOSHI;OKANO MAKOTO;SUGA KEIJI
分类号 G11B7/26;(IPC1-7):G11B7/26 主分类号 G11B7/26
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