MOIRE INTERFEROMETER WITH OVERLAPPING ILLUMINATION AND IMAGING SYSTEMS
摘要
A moiré interferometer (10) has an illumination system (14) and an imaging system (24) that share a common focusing optic (36), which preferably takes the form of a concave mirror. Within the illumination system (14), the common focusing optic (36) collimates light en route to a test surface (12). Within the imaging system (24), the common focusing optic (36) telecentrically images a grating pattern appearing on the test surface (12) onto a fringe pattern detector (26).
申请公布号
WO0239054(A1)
申请公布日期
2002.05.16
申请号
WO2001US42677
申请日期
2001.10.11
申请人
CORNING TROPEL CORPORATION;KULAWIEC, ANDREW, W.;LINDQUIST, DAG;PLATTEN, JAMES, E.;DEWA, PAUL, G.
发明人
KULAWIEC, ANDREW, W.;LINDQUIST, DAG;PLATTEN, JAMES, E.;DEWA, PAUL, G.