发明名称 SEMICONDUCTOR DEVICE AND TEST METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device allowing delay estimation independent of chip size or a measuring device, and to provide a test method therefor. SOLUTION: In this semiconductor device 100, a semiconductor chip 110 is disposed with an input I/O circuit 122 and an output I/O circuit 124. A basic cell area of a chip core part of the semiconductor chip 110 is disposed with a test cell 130 including a delay estimation circuit. The test cell 130 includes a first delay circuit 150 composed of a chain of plural inverters connected to each other by only a first wiring layer, and a delay estimation changeover circuit 152. A first measurement mode for measuring a delay time between the input I/O circuit 122 and the output I/O circuit 124 through a through pass, and a second measurement mode for measuring a delay time between the input I/O circuit 122 and the output I/O circuit 124 through the first delay circuit 150 can be changed over.
申请公布号 JP2002122638(A) 申请公布日期 2002.04.26
申请号 JP20000317496 申请日期 2000.10.18
申请人 SEIKO EPSON CORP 发明人 SEKI HIROSHI
分类号 G01R31/28;G01R31/30;G01R31/317;H01L21/822;H01L27/04;(IPC1-7):G01R31/28 主分类号 G01R31/28
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