发明名称 PEELING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a peeling device which can peel off the unnecessary portion of a photosensitive material provided on a glass substrate with accuracy. SOLUTION: A cutter 14 is brought into contact with an object 20 composed of the glass substrate 21 and a resin layer 22 and a protective layer 23 both of which are provided on the substrate 21. The cutter 21 has a curved edge section 14a and is supported by a cutter supporting body 13 which is rotatably attached to a moving body 11. When the moving body 11 is gradually moved horizontally and upward, the cutter 14 removes the unnecessary portion by cutting the resin layer 22 and protective layer 23 provided on the substrate 21.
申请公布号 JP2002043202(A) 申请公布日期 2002.02.08
申请号 JP20000229498 申请日期 2000.07.28
申请人 DAINIPPON PRINTING CO LTD 发明人 KAWAKAMI YUJI
分类号 G03F7/42;H01L21/027;(IPC1-7):H01L21/027 主分类号 G03F7/42
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