| 发明名称 |
ELECTRIC FIELD DISCHARGE TYPE COLD CATHODE, ITS METHOD FOR MANUFACTURING AND VACUUM MICRO EQUIPMENT |
| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method of contributing to improving its reliability and quality for an electric field discharge type cold cathode using flaren or a carbon nano-tube as an emitter. SOLUTION: The emitter is composed of a metal plated layer 15 formed on a support substrate 11 and an ejecting portion constructed with a flaren 17 or the carbon nano-tube 16 which is partly embedded in the metal plated layer 15.</p> |
| 申请公布号 |
JP2001283716(A) |
申请公布日期 |
2001.10.12 |
| 申请号 |
JP20000098026 |
申请日期 |
2000.03.31 |
| 申请人 |
TOSHIBA CORP |
发明人 |
NAKAMOTO MASAYUKI |
| 分类号 |
C23C18/52;C23C28/00;C25D7/00;C25D15/02;H01J1/304;H01J9/02;H01J29/04;H01J31/12;(IPC1-7):H01J1/304 |
主分类号 |
C23C18/52 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
