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发明名称
摘要
申请公布号	JP3214319(B2)	申请公布日期	2001.10.02
申请号	JP19950285557	申请日期	1995.11.02
申请人		发明人
分类号	H01L21/60;H05K3/34;(IPC1-7):H01L21/60	主分类号	H01L21/60
代理机构		代理人
主权项
地址

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