首页
产品
黄页
商标
征信
会员服务
注册
登录
全部
|
企业名
|
法人/股东/高管
|
品牌/产品
|
地址
|
经营范围
发明名称
RF POWERED PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION REACTOR AND METHODS
摘要
申请公布号
EP1057207(A1)
申请公布日期
2000.12.06
申请号
EP19990934367
申请日期
1999.02.16
申请人
MICRON TECHNOLOGY, INC.;APPLIED MATERIALS, INC.
发明人
SHARAN, SUJIT;SANDHU, GURTEJ, S.;SMITH, PAUL
分类号
C23C16/509;C23C16/505;H01J37/32;H01L21/205;H05H1/46;(IPC1-7):H01J37/32
主分类号
C23C16/509
代理机构
代理人
主权项
地址
您可能感兴趣的专利
HANGING STAND OF SAP BOTTLE AND MANUFACTURING METHOD THEREOF
PRINTER FOR POTTERY
PRESSURIZED CARTRIDGE
TARGET OF CRITICAL DIMENSION AND MEASURING METHOD THEREOF
WATER PURIFYING SYSTEM
DETAILED INFORMATION PROCESSING METHOD OF SOFTWARE ALARM IN EXCHANGE
METHOD TO CONTROL POWER LINE PROTECTIVE DIGITAL DISTANCE RELAY
BIT LINE PRECHARGING AND EQUALIZING CIRCUIT IN A DYNAMIC RANDOM ACCESS MEMORY DEVICE
SIMPLE DIALING METHOD OF TERMINAL
DRIVING CONTROLLER OF BLOWER MOTOR FOR AIR CONDITIONER CONDENSER
COLOR FILTER BOARD MANUFACTURING PROCESS & PATTERN REPAIRING DEVICE & ASSISTANT EXPOSURE DEVICE
SEMICONDUCTOR MEMORY DEVICE HAVING A TRIPPLE WELL STRUCTURE
SPOT DELETING CIRCUIT OF DISPLAY DEVICE
MICRO SCANNING OPTICS SYSTEM FOR THERMAL IMAGE APPARATUS
PHOTO REGISTER PROJECTING CONTROLLER FOR SPREADING WAFER AND CONTROL METHOD
COMMUNICATION METHOD AND DEVICE OF AIR CONDITIONER
IMIDAZOLIDIN-2,4-DIONES USEFUL AS ANTICANCER AGENT AND PREPARING THEM
MANUFACTURING METHOD OF STATIC RANDOM ACCESS MEMORY DEVICE
PRODUCTION METHOD OF ACTIVATED CARBON FIBER OF HIGH FUNCTION BY ANODE OXIDATION
SWITCHING UNIT FOR EXCHANGE DEVICE