| 摘要 |
PROBLEM TO BE SOLVED: To enable a surface-emission laser array to be composed of vertical resonator-type surface emission laser elements which are each provided with a stable high-power single lateral mode by a method wherein the light emission regions of the surface emission laser elements are arranged adjacent to each other so as to form a ring. SOLUTION: An N-type GaAs buffer layer 22 is laminated on an n-type GaAs substrate 21, and an N-type lower DBR layer 23, an active layer region 24, a P-type AlAs layer 25, a P-type upper DBR layer 26, and a P-type GaAs contact layer 27 are successively laminated. Then, the laminate is etched up to a halfway point in the lower DBR layer 23 to form a mesa 50 making the side face of the AlAs layer 25 exposed, only the AlAs layer 25 is oxidized with water vapor from its side to form an oxide region 30, by which a non-oxide region 25a serves as a current injection region, an SiN insulating film 32 is evaporated except on the top surface of the mesa 50, a Ti/Au layer is deposited except on an emission opening 40 to serve as a P-side electrode 33. Therefore, when VCSEL elements are arranged like a ring on a conductive holding board, a VCSEL array can be obtained.
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