Cathode arc source with target feeding apparatus,申请号GB20000010053-传众专利搜索

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发明名称	Cathode arc source with target feeding apparatus
摘要
申请公布号	GB0010053(D0)	申请公布日期	2000.06.14
申请号	GB20000010053	申请日期	1998.10.26
申请人	FILPLAS VACUUM TECHNOLOGY PTE LIMITED	发明人
分类号	C23C14/24;H01J37/32	主分类号	C23C14/24
代理机构		代理人
主权项
地址

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