发明名称 |
Split phase high performance, high frequency, high dynamic range interferometer |
摘要 |
Processing two interference signals to reconstruct a target image includes splitting a laser beam into a reference beam and a measurement beam, and in turn splitting the reference beam into two sub-reference beams. A phase shift is introduced into one of the sub-reference beams, the phase shift being substantially 90 degrees. A measurement beam is reflected from a surface of a moving target, and split into two sub-measurement beams. A first respective sub-reference beam is combined with a first sub-measurement beam, and the second sub-reference beam is combined with the second sub-measurement beam, and the in phase and out of phase signals reconstruct the target surface. Adjustment of the split sub-reference beams is effected by Pockels cells to achieve the desired phase difference between the two sub-reference beams. The reconstructed motion of the target surface is effected with a selected frequency characteristic, spatial resolution and range characteristic.
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申请公布号 |
US5999261(A) |
申请公布日期 |
1999.12.07 |
申请号 |
US19980113668 |
申请日期 |
1998.07.10 |
申请人 |
SEAGATE TECHNOLOGY, INC. |
发明人 |
PRESSESKY, JASON L.;CHENG, YUH-JEN |
分类号 |
G01B9/02;(IPC1-7):G01B9/02 |
主分类号 |
G01B9/02 |
代理机构 |
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地址 |
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