发明名称 Split phase high performance, high frequency, high dynamic range interferometer
摘要 Processing two interference signals to reconstruct a target image includes splitting a laser beam into a reference beam and a measurement beam, and in turn splitting the reference beam into two sub-reference beams. A phase shift is introduced into one of the sub-reference beams, the phase shift being substantially 90 degrees. A measurement beam is reflected from a surface of a moving target, and split into two sub-measurement beams. A first respective sub-reference beam is combined with a first sub-measurement beam, and the second sub-reference beam is combined with the second sub-measurement beam, and the in phase and out of phase signals reconstruct the target surface. Adjustment of the split sub-reference beams is effected by Pockels cells to achieve the desired phase difference between the two sub-reference beams. The reconstructed motion of the target surface is effected with a selected frequency characteristic, spatial resolution and range characteristic.
申请公布号 US5999261(A) 申请公布日期 1999.12.07
申请号 US19980113668 申请日期 1998.07.10
申请人 SEAGATE TECHNOLOGY, INC. 发明人 PRESSESKY, JASON L.;CHENG, YUH-JEN
分类号 G01B9/02;(IPC1-7):G01B9/02 主分类号 G01B9/02
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