发明名称 |
Method for forming an electrode for electrical connection to oxide superconductor |
摘要 |
A metal electrode formed on an oxide superconductor for electric connection to the oxide superconductor, includes a first layer of Ag in direct contact with the oxide superconductor, and a second layer formed on the first layer. The second layer is formed of noble metal excluding Ag. The metal electrode can be formed by forming a first layer of Ag to cover a whole surface of the oxide superconductor layer, and forming a second layer of noble metal excluding Ag, to cover a whole surface of the first layer, thereby to form a double metal layer, and patterning the double metal layer so as to form a metal electrode composed of the double metal layer. |
申请公布号 |
EP0419361(B2) |
申请公布日期 |
1999.12.01 |
申请号 |
EP19900402604 |
申请日期 |
1990.09.20 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD. |
发明人 |
TANAKA, SABURO;ITOZAKI, HIDEO;YAZU, SHUJI |
分类号 |
H01L39/24;(IPC1-7):H01L39/24;H01L23/48 |
主分类号 |
H01L39/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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