| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an object to be treated housing device of a structure, wherein with the internal atmosphere within a container main body filled with an inert gas, particles will not be flung up at the feeding of the inert gas. SOLUTION: An object to be treated housing device is constituted into such a structure that the device is provided with a transferable box-shaped container main body 40 having an opening and shutting door 46, which is hermetically opened and shut, support members 52 which are provided in the inner surface of the main body 40 and are used for supporting a body W to be treated in a multistage structure, a gas inlet port 66 provided in the main body 40 for introducing an inert gas, a gas exhaust port 68 provided in the main body 40 for exhausting the internal atmosphere within the main body 40, a gas inlet nozzle 54 which is connected with the port 66 and is extended in the interior of the main body 40, a diffusion force inhibiting member 56, which is provided on the point of the nozzle 54 and inhibits the diffusion force of the gas which is introduced in the main body 40. As a result, the diffusion force of the inert gas fed through the nozzle 54 is inhibited by the member 56 and with the internal atmosphere filled with the inert gas, particles are prevented from being flung up at the feeding of the inert gas.</p> |
