申请人 |
SHIN-ETSU CHEMICAL CO., LTD., TOKIO/TOKYO, JP |
发明人 |
MATSUDA, TAKASHI, C/O SILICONE ELEC MAT RES CENT, USUI-GUN, GUNMA-KEN, JP;SATO, SHINICHI, C/O SILICONE ELEC MAT RESCENT, USUI-GUN, GUNMA-KEN, JP;KOIKE, NORIYUKI, C/O SILICONE ELEC MAT RESCENT, USUI-GUN, GUNMA-KEN, JP |