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发明名称
Semiconductor substrate cleaning method
摘要
申请公布号
EP0718872(B1)
申请公布日期
1999.01.20
申请号
EP19950305651
申请日期
1995.08.14
申请人
FUJITSU LIMITED
发明人
HAYAMI, YUKA;SUZUKI, MIKI T.;OGAWA, HIROKI
分类号
H01L21/304;B08B3/10;H01L21/306;(IPC1-7):H01L21/302;B08B3/04
主分类号
H01L21/304
代理机构
代理人
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