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发明名称
PRODUCTION OF THIN-FILM CAPACITOR
摘要
申请公布号
JPH10308325(A)
申请公布日期
1998.11.17
申请号
JP19970128050
申请日期
1997.04.30
申请人
MURATA MFG CO LTD
发明人
TAKESHIMA YUTAKA
分类号
C23C16/40;C23C16/50;C23C16/511;H01G4/12;H01G4/33;(IPC1-7):H01G4/33
主分类号
C23C16/40
代理机构
代理人
主权项
地址
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