| 摘要 |
PROBLEM TO BE SOLVED: To easily perform an effective quality management for a semiconductor wafer. SOLUTION: When the person in charge desires organization of a lot using an existing wafer, a lot registration part 10b takes an existing wafer information out of a lot information database 10a, and lists and displays it on the screen of a system terminal 12. Then a new lot is organized with the wafer selected from the list, and the information is stored in the lot information database 10a. A lot charge authorizing part 10c displays a lot charge application information in the lot information database 10a on the screen of the system terminal 12, and accepts an input of permission or not of charging lot. And the information of permitting charge or not is stored in the lot information database 10a. A lot organization information providing part 10d provides an automatic wafer transferring machine 14 with the information of the lot which is permitted to be charged, after selection. |
