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发明名称
PURAZUMASHORISOCHI
摘要
申请公布号
JP2630603(B2)
申请公布日期
1997.07.16
申请号
JP19870291329
申请日期
1987.11.17
申请人
MITSUBISHI DENKI KK
发明人
OGAWA TOSHIAKI;SHIBANO TERUO;MORITA HIROYUKI;NISHIOKA KYUSAKU;FUJIWARA NOBUO
分类号
H01L21/205;H01L21/302;H01L21/3065;H01L21/31;(IPC1-7):H01L21/306
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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