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发明名称
CONTACT MEMBER RELATIVE TO ELECTRICALLY CHARGED MATERIAL
摘要
申请公布号
EP0439619(B1)
申请公布日期
1997.04.23
申请号
EP19900911693
申请日期
1990.08.02
申请人
OHMI, TADAHIRO;TAKASAGO NETSUGAKU KOGYO KABUSHIKI KAISHA
发明人
OHMI, TADAHIRO;INABA, HITOSHI
分类号
H01L21/687;H01L21/677;H01L21/683;H05F3/02;(IPC1-7):H01L21/68
主分类号
H01L21/687
代理机构
代理人
主权项
地址
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