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发明名称
Vorrichtung zum Greifen und Halten eines flachen Substrats
摘要
申请公布号
DE19529945(A1)
申请公布日期
1997.02.20
申请号
DE1995129945
申请日期
1995.08.16
申请人
BALZERS UND LEYBOLD DEUTSCHLAND HOLDING AG, 63450 HANAU, DE
发明人
REISING, MICHAEL, 63776 MOEMBRIS, DE;KEMPF, STEFAN, 63755 ALZENAU, DE;KOENIG, MICHAEL, 60529 FRANKFURT, DE
分类号
B65G47/90;C23C14/50;(IPC1-7):C23C14/50;H01F7/06;B65G49/07
主分类号
B65G47/90
代理机构
代理人
主权项
地址
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