| 摘要 |
PROBLEM TO BE SOLVED: To stably produce silicon nitride powder having stable quality such as a stable ratio betweenα- andβ-phases on an industrial scale. SOLUTION: Spherical particles formed by granulation-coating the surfaces of silicon nitride-base particles as nuclei with metallic silicon powder are used as starting material and nitrided in the temp. range of 1,000-1,500 deg.C in an atmosphere of nonoxidizing gas contg. nitrogen or ammonia.
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