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发明名称
MOLECULAR BEAM CELL
摘要
申请公布号
JPH097947(A)
申请公布日期
1997.01.10
申请号
JP19950154830
申请日期
1995.06.21
申请人
ANELVA CORP
发明人
KAMIBAYASHI ATSUSHI
分类号
C30B23/08;C30B29/48;H01L21/203;(IPC1-7):H01L21/203
主分类号
C30B23/08
代理机构
代理人
主权项
地址
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