| 摘要 |
PURPOSE: To provide a system for managing a product manufacturing change history and a defect history which can retrieve the product manufacturing change history and defect history for every set or mounted substrate. CONSTITUTION: A system for managing a product manufacturing change history and a defect history is provided with a data processing means 1 and an input means 2, a displaying means 3, an output means 4, and a storing means which are connected to the means 1 in on-line states and the storing means stores a file 5 in which the serial numbers of sets and substrates are described, a production lot breakdown file 6 in which the manufacturing dates of substrates lots and serial numbers of substrates are described, a substrate production program change history file 7, a manufacturing substrate change memorandum file 15, and a defect history file 18 in which a defect history or a defective substrate history are described for every set. Since the file in which the serial numbers of sets are correlated with the serial numbers of substrates is provided, the product manufacturing change history and the defect history can be retrieved for every set of machines and every substrate. |
