| 摘要 |
PURPOSE: To provide an actuator which can sufficiently be used as a drive motive for a micro-machine owing to its large torque at the time of displacement, generates a large restraining force of two objects, and also can be used as a structural member of micro-machine satisfactorily. CONSTITUTION: An actuator concerned has a pair of actuator members 2a, 2b which engage each other and are composed of a plurality of base members 4 laid one over another with gaps 3 reserved and coupling members 5 which couple the base members 4 at their ends. When a bias voltage is impressed on these actuator members 2a, 2b, moving elements show a certain inclination. If in this condition a pulsated electric field and/or sine wave electric field are superimposed and vibrated, the two actuator members 2a, 2b are displaced in such directions that their moving elements are not restrained by each other. With the displacements a movement is generated in the actuator 1. |
